Wet Preparation of Defect-Free Hydrogen-Terminated Silicon...

Solid State Phenomena 2001 Vol. 76-77

Wet Preparation of Defect-Free Hydrogen-Terminated Silicon Wafer Surface and Its Characterization in Atomic-Scale

Takahagi, Takayuki, Shingubara, Shozo, Sakaue, Hiroyuki
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Volume:
76-77
Year:
2001
Journal:
Solid State Phenomena
DOI:
10.4028/www.scientific.net/SSP.76-77.105
File:
PDF, 568 KB
2001
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