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Plasma parameters in the vicinity of the quartz window of a low pressure surface wave discharge produced in O2
S. Nakao, E. Stamate, H. SugaiVolume:
515
Year:
2007
Language:
english
Pages:
5
DOI:
10.1016/j.tsf.2006.10.050
File:
PDF, 539 KB
english, 2007