Volume 515; Issue 12

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Thin Solid Films
Volume 515; Issue 12

Thin Solid Films

Volume 515; Issue 12

1

Proceedings of the international symposium on dry process — DPS 2005

E. Stamate, N. Fujiwara

Journal:

Thin Solid Films

Year:

2007

Language:

english

File:

PDF, 112 KB

english, 2007

2

Profile simulation of high aspect ratio contact etch

Doosik Kim, Eric A. Hudson, David Cooperberg, Erik Edelberg, Mukund Srinivasan

Journal:

Thin Solid Films

Year:

2007

Language:

english

File:

PDF, 475 KB

english, 2007

3

Plasma/reactor walls interactions in advanced gate etching processes

R. Ramos, G. Cunge, O. Joubert, N. Sadeghi, M. Mori, L. Vallier

Journal:

Thin Solid Films

Year:

2007

Language:

english

File:

PDF, 611 KB

english, 2007

4

Surface modification of poly(dimethylsiloxane) for controlling biological cells’ adhesion using a scanning radical microjet

Helen M.L. Tan, H. Fukuda, T. Akagi, T. Ichiki

Journal:

Thin Solid Films

Year:

2007

Language:

english

File:

PDF, 808 KB

english, 2007

5

Laser-induced fluorescence ion diagnostics in light of plasma processing

R. McWilliams, J.P. Booth, E.A. Hudson, J. Thomas, D. Zimmerman

Journal:

Thin Solid Films

Year:

2007

Language:

english

File:

PDF, 359 KB

english, 2007

6

Amperometric biosensor based on direct electrochemistry of hemoglobin in poly-allylamine (PAA) film

A.K.M. Kafi, Dong-Yun Lee, Sang-Hyun Park, Young-Soo Kwon

Journal:

Thin Solid Films

Year:

2007

Language:

english

File:

PDF, 375 KB

english, 2007

7

Controlled drug release using nanoporous anodic aluminum oxide on stent

Ho-Jae Kang, Deug Joong Kim, Sung-Joon Park, Ji-Beom Yoo, Y.S. Ryu

Journal:

Thin Solid Films

Year:

2007

Language:

english

File:

PDF, 803 KB

english, 2007

8

Chemical dry etching of silicon oxide in F2/Ar remote plasmas

S.C. Kang, D.J. Kim, J.Y. Hwang, Y.B. Yun, N.-E. Lee, Y.C. Jang, G.H. Bae

Journal:

Thin Solid Films

Year:

2007

Language:

english

File:

PDF, 506 KB

english, 2007

9

Effect of doping elements on ZnO etching characteristics with CH4/H2/Ar plasma

M.H. Shin, M.S. Park, S.H. Jung, J.H. Boo, N.-E. Lee

Journal:

Thin Solid Films

Year:

2007

Language:

english

File:

PDF, 288 KB

english, 2007

10

Improved crystallization characteristics of ZnO thin film grown onto a-C:H film used as a buffer layer

Eung Kwon Kim, Tae Yong Lee, Yong Seob Park, Somnath Ghosh, Byungyou Hong, Young Sung Kim, Joon Tae Song

Journal:

Thin Solid Films

Year:

2007

Language:

english

File:

PDF, 740 KB

english, 2007

11

Epitaxial growth of lithium niobate film using metalorganic chemical vapor deposition

Yasunobu Akiyama, Katsuya Shitanaka, Hiroshi Murakami, Young-Sik Shin, Michihide Yoshida, Nobuyuki Imaishi

Journal:

Thin Solid Films

Year:

2007

Language:

english

File:

PDF, 635 KB

english, 2007

12

Plasma enhanced chemical vapor deposition of low dielectric constant SiOC(–H) films using MTES/O2 precursor

R. Navamathavan, Chi Kyu Choi

Journal:

Thin Solid Films

Year:

2007

Language:

english

File:

PDF, 587 KB

english, 2007

13

Change of the argon-based atmospheric pressure large area plasma characteristics by the helium and oxygen gas mixing

J.K. Rhee, D.B. Kim, S.Y. Moon, W. Choe

Journal:

Thin Solid Films

Year:

2007

Language:

english

File:

PDF, 366 KB

english, 2007

14

Growth of VO2 films with metal-insulator transition on silicon substrates in inductively coupled plasma-assisted sputtering

Kunio Okimura, Naotaka Kubo

Journal:

Thin Solid Films

Year:

2007

Language:

english

File:

PDF, 612 KB

english, 2007

15

Properties of plasma enhanced chemical vapor deposited silicon nitride for the application in multicrystalline silicon solar cells

Jinsu Yoo, S.K. Dhungel, J. Yi

Journal:

Thin Solid Films

Year:

2007

Language:

english

File:

PDF, 510 KB

english, 2007

16

Carbon incorporation process in GaAsN films grown by chemical beam epitaxy using MMHy or DMHy as the N source

H. Suzuki, K. Nishimura, H.S. Lee, Y. Ohshita, N. Kojima, M. Yamaguchi

Journal:

Thin Solid Films

Year:

2007

Language:

english

File:

PDF, 223 KB

english, 2007

17

Theoretical study of a new phosphorescent iridium(III) quinazoline complex

Young Hee Lee, Young Sik Kim

Journal:

Thin Solid Films

Year:

2007

Language:

english

File:

PDF, 368 KB

english, 2007

18

Bicrystalline gallium oxide nanobelts

Hyoun Woo Kim, Seung Hyun Shim

Journal:

Thin Solid Films

Year:

2007

Language:

english

File:

PDF, 1.28 MB

english, 2007

19

Phase transition characteristics of Bi/Sn doped Ge2Sb2Te5thin film for PRAM application

Tae-Jin Park, Se-Young Choi, Myung-Jin Kang

Journal:

Thin Solid Films

Year:

2007

Language:

english

File:

PDF, 838 KB

english, 2007

20

Ni-silicide precursor for gate electrodes

M. Ishikawa, I. Muramoto, H. Machida, S. Imai, A. Ogura, Y. Ohshita

Journal:

Thin Solid Films

Year:

2007

Language:

english

File:

PDF, 447 KB

english, 2007

21

Effects of radical-distribution control on etching-profile uniformity in dielectric etching

Hiroyuki Kobayashi, Ken'etsu Yokogawa, Kenji Maeda, Tadamitsu Kanekiyo, Masaru Izawa

Journal:

Thin Solid Films

Year:

2007

Language:

english

File:

PDF, 441 KB

english, 2007

22

Growth of crystallized Ge films from VHF inductively-coupled plasma of H2-diluted GeH4

T. Sakata, K. Makihara, H. Murakami, S. Higashi, S. Miyazaki

Journal:

Thin Solid Films

Year:

2007

Language:

english

File:

PDF, 634 KB

english, 2007

23

Control of substrate surface temperature in millisecond annealing technique using thermal plasma jet

T. Okada, S. Higashi, H. Kaku, N. Koba, H. Murakami, S. Miyazaki

Journal:

Thin Solid Films

Year:

2007

Language:

english

File:

PDF, 634 KB

english, 2007

24

Plasma parameters in the vicinity of the quartz window of a low pressure surface wave discharge produced in O2

S. Nakao, E. Stamate, H. Sugai

Journal:

Thin Solid Films

Year:

2007

Language:

english

File:

PDF, 539 KB

english, 2007

25

Improvement in gate LWR with plasma curing of ArF photoresists

A. Ando, E. Matsui, N.N. Matsuzawa, Y. Yamaguchi, K. Kugimiya, M. Yoshida, K.M.A. Salam, T. Kusakabe, T. Tatsumi

Journal:

Thin Solid Films

Year:

2007

Language:

english

File:

PDF, 896 KB

english, 2007

26

Wall charge characteristics in accordance with square and ramped reset pulse in alternating current plasma display panels (AC-PDPs)

S.B. Lee, J.H. Lee, H.J. Lee, M.W. Moon, P.Y. Oh, K.B. Song, E.H. Choi

Journal:

Thin Solid Films

Year:

2007

Language:

english

File:

PDF, 549 KB

english, 2007

27

Novel organosiloxane vapor annealing process for improving properties of porous low-k films

K. Kohmura, H. Tanaka, S. Oike, M. Murakami, N. Fujii, S. Takada, T. Ono, Y. Seino, T. Kikkawa

Journal:

Thin Solid Films

Year:

2007

Language:

english

File:

PDF, 512 KB

english, 2007

28

Fabrication of dye sensitized solar cell using TiO2 coated carbon nanotubes

Tae Young Lee, P.S. Alegaonkar, Ji-Beom Yoo

Journal:

Thin Solid Films

Year:

2007

Language:

english

File:

PDF, 691 KB

english, 2007

29

Plasma and antenna characteristics of a linearly extended inductively coupled plasma system using multi-polar magnetic field

Kyong Nam Kim, Jong Hyeuk Lim, Geun Young Yeom

Journal:

Thin Solid Films

Year:

2007

Language:

english

File:

PDF, 423 KB

english, 2007

30

Mechanical properties of electrospun PVA/MWNTs composite nanofibers

J.S. Jeong, J.S. Moon, S.Y. Jeon, J.H. Park, P.S. Alegaonkar, J.B. Yoo

Journal:

Thin Solid Films

Year:

2007

Language:

english

File:

PDF, 690 KB

english, 2007

31

Refractive index and etched structure of silicon nitride waveguides fabricated by PECVD

D.H. Yoon, S.G. Yoon, Y.T. Kim

Journal:

Thin Solid Films

Year:

2007

Language:

english

File:

PDF, 472 KB

english, 2007

32

Fabrication and characteristics of out-of-plane piezoelectric micro grippers using MEMS processes

Chang-Seong Jeon, Joon-Shik Park, Sang-Yeol Lee, Chan-Woo Moon

Journal:

Thin Solid Films

Year:

2007

Language:

english

File:

PDF, 708 KB

english, 2007

33

Etching characteristics and modeling for oval-shaped contact

Sung-Chan Park, Seok-Hyun Lim, Chul-Ho Shin, Gyung-Jin Min, Chang-Jin Kang, Han-Ku Cho, Joo-Tae Moon

Journal:

Thin Solid Films

Year:

2007

Language:

english

File:

PDF, 913 KB

english, 2007

34

Efficient red-emitting phosphorescent iridium(III) complexes of fluorinated 2,4-diphenylquinolines

G.Y. Park, Y.S. Kim, Y.K. Ha

Journal:

Thin Solid Films

Year:

2007

Language:

english

File:

PDF, 310 KB

english, 2007

35

Study of plasma charging-induced white pixel defect increase in CMOS active pixel sensor

Ken Tokashiki, KeunHee Bai, KyeHyun Baek, Yongjin Kim, Gyungjin Min, Changjin Kang, Hanku Cho, Jootae Moon

Journal:

Thin Solid Films

Year:

2007

Language:

english

File:

PDF, 1.26 MB

english, 2007

36

Effect of additive gases on the selective etching of ZrOx film using inductively coupled BCl3-based plasmas

S.D. Park, J.H. Lim, G.Y. Yeom

Journal:

Thin Solid Films

Year:

2007

Language:

english

File:

PDF, 309 KB

english, 2007

37

Synthesis and blue electroluminescent properties of zinc (II) [2-(2-hydroxyphenyl)benzoxazole]

Won Sam Kim, Jung Min You, Burm-Jong Lee, Yoon-Ki Jang, Dong-Eun Kim, Young-Soo Kwon

Journal:

Thin Solid Films

Year:

2007

Language:

english

File:

PDF, 788 KB

english, 2007

38

Fabrication of nano-pillar chips by a plasma etching technique for fast DNA separation

R. Ogawa, H. Ogawa, A. Oki, S. Hashioka, Y. Horiike

Journal:

Thin Solid Films

Year:

2007

Language:

english

File:

PDF, 985 KB

english, 2007

39

Realization of various sub-micron metal patterns using room temperature nanoimprint lithography

Jun-Ho Sung, Min-Woo Lee, Seung-Gol Lee, Se-Guen Park, El-Hang Lee, Beom-Hoan O

Journal:

Thin Solid Films

Year:

2007

Language:

english

File:

PDF, 1.02 MB

english, 2007

40

Influences of atomic hydrogen on porous low-k dielectric for 45-nm node

K. Tomioka, E. Soda, N. Kobayashi, M. Takata, S. Uda, K. Ogushi, Y. Yuba, Y. Akasaka

Journal:

Thin Solid Films

Year:

2007

Language:

english

File:

PDF, 586 KB

english, 2007

41

One-dimensional carbon and ZnO

J.M. Ting, K.H. Liao, T.L. Chou

Journal:

Thin Solid Films

Year:

2007

Language:

english

File:

PDF, 1.76 MB

english, 2007

42

Dry etching of magnesium oxide thin films by using inductively coupled plasma for buffer layer of MFIS structure

Gwan-Ha Kim, Chang-Il Kim

Journal:

Thin Solid Films

Year:

2007

Language:

english

File:

PDF, 782 KB

english, 2007

43

Atmospheric plasma-calcination of mesoporous tungsten oxide utilizing plasma dielectric barrier discharge

P. Baroch, J. Hieda, N. Saito, O. Takai

Journal:

Thin Solid Films

Year:

2007

Language:

english

File:

PDF, 621 KB

english, 2007

44

Time evolution of electrode voltage distribution in large-area capacitively coupled plasmas

Masaaki Matsukuma, Satoshi Hamaguchi

Journal:

Thin Solid Films

Year:

2007

Language:

english

File:

PDF, 468 KB

english, 2007

45

Submicron optical near-field diffraction patterns obtained by irradiation of octadecyltrimethoxysilane self-assembled monolayers with light at 157 nm

F.A. Nae, N. Saito, O. Takai

Journal:

Thin Solid Films

Year:

2007

Language:

english

File:

PDF, 1.20 MB

english, 2007

46

The volt–ampere characteristics of a DC arc plasmatron with a distributed anode spot

H.J. Lee, V.Yu. Plaksin, V.A. Riaby

Journal:

Thin Solid Films

Year:

2007

Language:

english

File:

PDF, 763 KB

english, 2007

47

Study on electrical conduction of viologen derivatives using scanning tunneling microscopy

Nam-Suk Lee, Hoon-Kyu Shin, Dong-Jin Qian, Young-Soo Kwon

Journal:

Thin Solid Films

Year:

2007

Language:

english

File:

PDF, 546 KB

english, 2007

48

The structures of low dielectric constant SiOC thin films prepared by direct and remote plasma enhanced chemical vapor deposition

Jaeyeong Heo, Hyeong Joon Kim, JeongHoon Han, Jong-Won Shon

Journal:

Thin Solid Films

Year:

2007

Language:

english

File:

PDF, 486 KB

english, 2007

49

MD simulations of amorphous SiO2 thin film formation in reactive sputtering deposition processes

Masafumi Taguchi, Satoshi Hamaguchi

Journal:

Thin Solid Films

Year:

2007

Language:

english

File:

PDF, 546 KB

english, 2007

50

White OLEDs based on novel emissive materials such as Zn(HPB)2 and Zn(HPB)q

Yoon-Ki Jang, Dong-Eun Kim, Won-Sam Kim, Byung-Sang Kim, Oh-Kwan Kwon, Burm-Jong Lee, Young-Soo Kwon

Journal:

Thin Solid Films

Year:

2007

Language:

english

File:

PDF, 566 KB

english, 2007

51

Investigation of the ion dose non-uniformity caused by sheath-lens focusing effect on silicon wafers

N. Holtzer, E. Stamate, H. Toyoda, H. Sugai

Journal:

Thin Solid Films

Year:

2007

Language:

english

File:

PDF, 502 KB

english, 2007

52

A novel deep etching technology for Si and quartz materials

Yasuhiro Morikawa, Tooru Koidesawa, Toshio Hayashi, Koukou Suu

Journal:

Thin Solid Films

Year:

2007

Language:

english

File:

PDF, 803 KB

english, 2007

53

Controlling gate-CD uniformity by means of a CD prediction model and wafer-temperature distribution control

S. Kanno, G. Miya, J. Tanaka, T. Masuda, K. Kuwahara, M. Sakaguchi, A. Makino, T. Tsubone, T. Fujii

Journal:

Thin Solid Films

Year:

2007

Language:

english

File:

PDF, 462 KB

english, 2007

54

Electrical characteristics of poly(3-hexylthiophene) organic thin film transistor with electroplated metal gate electrodes on polyimide

Y.G. Seol, J.G. Lee, N.-E. Lee, Sang Seol Lee, Jinho Ahn

Journal:

Thin Solid Films

Year:

2007

Language:

english

File:

PDF, 571 KB

english, 2007

55

Heteroleptic tris-cyclometalated iridium(III) complexes with phenylpridine and diphenylquinoline derivative ligands

Yong Hwan Park, Young Sik Kim

Journal:

Thin Solid Films

Year:

2007

Language:

english

File:

PDF, 535 KB

english, 2007

56

Organic light-emitting devices with a mixed layer acting as a hole transport and as an emitting/electron transport layer

Y.B. Yoon, T.W. Kim, H.W. Yang, J.H. Kim, J.H. Seo, Y.K. Kim

Journal:

Thin Solid Films

Year:

2007

Language:

english

File:

PDF, 164 KB

english, 2007

57

Highly efficient organic light-emitting diodes fabricated utilizing nickel-oxide buffer layers between the anodes and the hole transport layers

H.C. Im, D.C. Choo, T.W. Kim, J.H. Kim, J.H. Seo, Y.K. Kim

Journal:

Thin Solid Films

Year:

2007

Language:

english

File:

PDF, 567 KB

english, 2007

58

Effects of SiO2 addition on discharge characteristics of the MgO protective layer in plasma display panel

H.K. Lee, J.W. Kim, S.J. Park, S.Y. Choi

Journal:

Thin Solid Films

Year:

2007

Language:

english

File:

PDF, 439 KB

english, 2007

59

Molecular dynamics simulation analyses on injection angle dependence of SiO2 sputtering yields by fluorocarbon beams

Tomohito Kawase, Satoshi Hamaguchi

Journal:

Thin Solid Films

Year:

2007

Language:

english

File:

PDF, 481 KB

english, 2007

60

Control of oxidation on NiSix during etching and ashing processes

S. Sakamori, K. Yonekura, N. Fujiwara, T. Kosaka, M. Ohkuni, K. Tateiwa

Journal:

Thin Solid Films

Year:

2007

Language:

english

File:

PDF, 416 KB

english, 2007

61

Suppression of hydrogen-ion drift into underlying layers using plasma deposited silicon oxynitride film during high-density plasma chemical vapor deposition

T. Murata, T. Yamaguchi, M. Sawada, S. Shimizu, K. Asai, K. Kobayashi, H. Miyatake, M. Yoneda

Journal:

Thin Solid Films

Year:

2007

Language:

english

File:

PDF, 548 KB

english, 2007

62

Suppression of 193-nm photoresist deformation by H2 addition to fluorocarbon plasma in via-hole etching

Kazumasa Yonekura, Kazunori Yoshikawa, Yuji Fujiwara, Shigenori Sakamori, Nobuo Fujiwara, Takayoshi Kosaka, Mitsuhiro Ohkuni, Kenji Tateiwa

Journal:

Thin Solid Films

Year:

2007

Language:

english

File:

PDF, 1.64 MB

english, 2007

63

Optical and electrical properties of p-type transparent conducting CuAlO2 thin film

D.S. Kim, S.J. Park, E.K. Jeong, H.K. Lee, S.Y. Choi

Journal:

Thin Solid Films

Year:

2007

Language:

english

File:

PDF, 1.30 MB

english, 2007

64

High-speed μc-Si films deposition and large-grain poly-Si films deposition by surface wave discharge

Y. Hotta, H. Toyoda, H. Sugai

Journal:

Thin Solid Films

Year:

2007

Language:

english

File:

PDF, 744 KB

english, 2007

65

Field-emission characteristics of diamond-like amorphous carbon films deposited by mixed gas (N2 or H2) controlled i-C4H10 supermagnetron plasma

Haruhisa Kinoshita, Manabu Yamashita

Journal:

Thin Solid Films

Year:

2007

Language:

english

File:

PDF, 319 KB

english, 2007

66

Sacrificial CVD film etch-back process for air-gap Cu interconnects

Shoichi Uno, Kiyomi Katsuyama, Junji Noguchi, Kiyohiko Sato, Takayuki Oshima, Masanori Katsuyama, Kazusato Hara

Journal:

Thin Solid Films

Year:

2007

Language:

english

File:

PDF, 1.06 MB

english, 2007

67

Feasibility study of material surface modification by millimeter size plasmas produced in a pin to plane electrode configuration

D.B. Kim, J.K. Rhee, S.Y. Moon, W. Choe

Journal:

Thin Solid Films

Year:

2007

Language:

english

File:

PDF, 515 KB

english, 2007

68

Controlling the ion flux on substrates of different geometry by sheath-lens focusing effect

E. Stamate, H. Sugai

Journal:

Thin Solid Films

Year:

2007

Language:

english

File:

PDF, 1.03 MB

english, 2007

69

Sputter deposition and surface treatment of TiO2 films for dye-sensitized solar cells using reactive RF plasma

Youl-Moon Sung, Hee-Je Kim

Journal:

Thin Solid Films

Year:

2007

Language:

english

File:

PDF, 536 KB

english, 2007

70

HfO2 gate insulator formed by atomic layer deposition for thin-film-transistors

S.-W. Jeong, H.J. Lee, K.S. Kim, M.T. You, Y. Roh, T. Noguchi, W. Xianyu, J. Jung

Journal:

Thin Solid Films

Year:

2007

Language:

english

File:

PDF, 836 KB

english, 2007

71

Formation of (001)-textured grain in (111) polycrystalline silicon film

Jae Hwan Oh, Eun Hyun Kim, Dong Han Kang, Jun hyuk Cheon, Kyung Ho Kim, Jin Jang

Journal:

Thin Solid Films

Year:

2007

Language:

english

File:

PDF, 874 KB

english, 2007

72

Threshold voltage shift of submicron p-channel MOSFET due to Si surface damage from plasma etching process

Gwan-Ha Kim, Young-Rog Kang, Whan-Jun Kim, Sang-Yong Kim, Chang-Il Kim

Journal:

Thin Solid Films

Year:

2007

Language:

english

File:

PDF, 750 KB

english, 2007

73

Electromagnetic sources of nonuniformity in large area capacitive reactors

A.A. Howling, L. Sansonnens, Ch. Hollenstein

Journal:

Thin Solid Films

Year:

2007

Language:

english

File:

PDF, 635 KB

english, 2007

74

Characterization and integration of new porous low-k dielectric (k 

Kyeong-Keun Choi, Ihl Hyun Cho, Sang Jong Park, Jung Eun Lim, Oh Jin Jung, Jong Hyuk Park, Byung Seung Min, Sung Bo Hwang, Min Jin Ko, Jeong Gun Lee

Journal:

Thin Solid Films

Year:

2007

Language:

english

File:

PDF, 1.07 MB

english, 2007

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