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Fabrication and characteristics of out-of-plane piezoelectric micro grippers using MEMS processes
Chang-Seong Jeon, Joon-Shik Park, Sang-Yeol Lee, Chan-Woo MoonVolume:
515
Year:
2007
Language:
english
Pages:
4
DOI:
10.1016/j.tsf.2006.10.062
File:
PDF, 708 KB
english, 2007