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Influences of atomic hydrogen on porous low-k dielectric for 45-nm node
K. Tomioka, E. Soda, N. Kobayashi, M. Takata, S. Uda, K. Ogushi, Y. Yuba, Y. AkasakaVolume:
515
Year:
2007
Language:
english
Pages:
4
DOI:
10.1016/j.tsf.2006.10.080
File:
PDF, 586 KB
english, 2007