The structures of low dielectric constant SiOC thin films...

The structures of low dielectric constant SiOC thin films prepared by direct and remote plasma enhanced chemical vapor deposition

Jaeyeong Heo, Hyeong Joon Kim, JeongHoon Han, Jong-Won Shon
How much do you like this book?
What’s the quality of the file?
Download the book for quality assessment
What’s the quality of the downloaded files?
Volume:
515
Year:
2007
Language:
english
Pages:
5
DOI:
10.1016/j.tsf.2006.10.095
File:
PDF, 486 KB
english, 2007
Conversion to is in progress
Conversion to is failed