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A New Approach to Study the Damage Induced by Inert Gases Implantation in Silicon
Peripolli, S., Beaufort, Marie France, Babonneau, David, Rousselet, Sophie, Fichtner, P.F.P., Amaral, L., Oliviero, Erwan, Barbot, Jean François, Donnelly, S.E.Volume:
108-109
Year:
2005
Language:
english
Journal:
Solid State Phenomena
DOI:
10.4028/www.scientific.net/SSP.108-109.357
File:
PDF, 725 KB
english, 2005