Formation of silicon carbide at low temperatures by...

Formation of silicon carbide at low temperatures by chemical transport of silicon induced by atmospheric pressure H2/CH4 plasma

H. Kakiuchi, H. Ohmi, K. Yasutake
How much do you like this book?
What’s the quality of the file?
Download the book for quality assessment
What’s the quality of the downloaded files?
Volume:
516
Year:
2008
Language:
english
Pages:
5
DOI:
10.1016/j.tsf.2007.11.031
File:
PDF, 491 KB
english, 2008
Conversion to is in progress
Conversion to is failed