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Low temperature growth of polycrystalline Si on polyethylene terephthalate (PET) films using pulsed-plasma CVD under near atmospheric pressure
M. Matsumoto, Y. Inayoshi, M. Suemitsu, T. Yara, S. Nakajima, T. Uehara, Y. ToyoshimaVolume:
516
Year:
2008
Language:
english
Pages:
4
DOI:
10.1016/j.tsf.2007.11.041
File:
PDF, 468 KB
english, 2008