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Effect of stage control parameters on the FIB milling process
Joon Hyun Kim, Jin-Hyo Boo, Youn-Jea KimVolume:
516
Year:
2008
Language:
english
Pages:
5
DOI:
10.1016/j.tsf.2007.11.102
File:
PDF, 605 KB
english, 2008