Effect of Self-Interstitials – Nanovoids Interaction on...

Solid State Phenomena 2005 Vol. 108-109

Effect of Self-Interstitials – Nanovoids Interaction on Two-Dimensional Diffusion and Activation of Implanted B in Si

Giannazzo, Filippo, Bruno, E., Mirabella, S., Impellizzeri, G., Napolitani, E., Raineri, Vito, Priolo, F., Alquier, Daniel
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Volume:
108-109
Year:
2005
Language:
english
Journal:
Solid State Phenomena
DOI:
10.4028/www.scientific.net/SSP.108-109.395
File:
PDF, 977 KB
english, 2005
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