Pulsed Laser Deposition of Hafnium Oxide on Silicon

Solid State Phenomena 2005 Vol. 108-109

Pulsed Laser Deposition of Hafnium Oxide on Silicon

Kappa, Mathias, Ratzke, Markus, Reif, Jürgen
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Volume:
108-109
Year:
2005
Language:
english
Journal:
Solid State Phenomena
DOI:
10.4028/www.scientific.net/SSP.108-109.723
File:
PDF, 720 KB
english, 2005
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