High temperature nucleation of oxygen precipitates in Germanium-doped Czochralski silicon
Jiahe Chen, Xiangyang Ma, Deren YangVolume:
518
Year:
2010
Language:
english
Pages:
4
DOI:
10.1016/j.tsf.2009.09.129
File:
PDF, 1.07 MB
english, 2010