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Honeycomb voids due to ion implantation in germanium
R.J. Kaiser, S. Koffel, P. Pichler, A.J. Bauer, B. Amon, A. Claverie, G. Benassayag, P. Scheiblin, L. Frey, H. RysselVolume:
518
Year:
2010
Language:
english
Pages:
3
DOI:
10.1016/j.tsf.2009.09.138
File:
PDF, 563 KB
english, 2010