Honeycomb voids due to ion implantation in germanium

R.J. Kaiser, S. Koffel, P. Pichler, A.J. Bauer, B. Amon, A. Claverie, G. Benassayag, P. Scheiblin, L. Frey, H. Ryssel

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Volume:

518

Year:

2010

Language:

english

Pages:

DOI:

10.1016/j.tsf.2009.09.138

File:

PDF, 563 KB

english, 2010

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