Molecular dynamics simulation of silicon oxidization

Thin Solid Films 2010 Vol. 518; Iss. 9

Molecular dynamics simulation of silicon oxidization

Patrick Ganster, Guy Tréglia, Frédéric Lancon, Pascal Pochet
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Volume:
518
Year:
2010
Language:
english
Pages:
5
DOI:
10.1016/j.tsf.2009.09.144
File:
PDF, 1.15 MB
english, 2010
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