Hydrogen in amorphous Si and Ge during solid phase epitaxy
B.C. Johnson, P. Caradonna, D.J. Pyke, J.C. McCallum, P. GortmakerVolume:
518
Year:
2010
Language:
english
Pages:
6
DOI:
10.1016/j.tsf.2009.09.145
File:
PDF, 830 KB
english, 2010