Synthesis of strained SiGe on Si(100) by pulsed laser induced epitaxy
T. Kociniewski, F. Fossard, J. Boulmer, D. BouchierVolume:
518
Year:
2010
Language:
english
Pages:
4
DOI:
10.1016/j.tsf.2009.09.154
File:
PDF, 460 KB
english, 2010