Silicon oxide synthesized using an atmospheric pressure microplasma jet from a tetraethoxysilane and oxygen mixture
Yi Ding, Qingtao Pan, Jie Jin, Haijun Jia, Hajime ShiraiVolume:
518
Year:
2010
Language:
english
Pages:
5
DOI:
10.1016/j.tsf.2009.11.031
File:
PDF, 458 KB
english, 2010