Volume 518; Issue 13

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Thin Solid Films
Volume 518; Issue 13

Thin Solid Films

Volume 518; Issue 13

1

Preface

K. Terashima, T. Watanabe, T. Ichiki, Y. Inoue

Journal:

Thin Solid Films

Year:

2010

Language:

english

File:

PDF, 54 KB

english, 2010

2

Growth of well-aligned carbon nanotubes by RF-DC plasma chemical vapor deposition

Yasuaki Hayashi, Takuya Fukumura, Kazunori Odani, Teruaki Matsuba, Risa Utsunomiya

Journal:

Thin Solid Films

Year:

2010

Language:

english

File:

PDF, 299 KB

english, 2010

3

Modification of peptide by surface-wave plasma processing

Iuliana Motrescu, Akihisa Ogino, Shigeyasu Tanaka, Taketomo Fujiwara, Shinya Kodani, Hirokazu Kawagishi, Gheorghe Popa, Masaaki Nagatsu

Journal:

Thin Solid Films

Year:

2010

Language:

english

File:

PDF, 976 KB

english, 2010

4

Plasma–surface interactions for advanced plasma etching processes in nanoscale ULSI device fabrication: A numerical and experimental study

Kouichi Ono, Hiroaki Ohta, Koji Eriguchi

Journal:

Thin Solid Films

Year:

2010

Language:

english

File:

PDF, 1.19 MB

english, 2010

5

Silicon oxide synthesized using an atmospheric pressure microplasma jet from a tetraethoxysilane and oxygen mixture

Yi Ding, Qingtao Pan, Jie Jin, Haijun Jia, Hajime Shirai

Journal:

Thin Solid Films

Year:

2010

Language:

english

File:

PDF, 458 KB

english, 2010

6

Chemical diagnosis of DLC by ESR spectral analysis

Yukinori Yamauchi, Yasushi Sasai, Shin-ichi Kondo, Masayuki Kuzuya

Journal:

Thin Solid Films

Year:

2010

Language:

english

File:

PDF, 413 KB

english, 2010

7

Difference of deposition process of an amorphous carbon film due to source gases

Masanori Shinohara, Hiroki Kawazoe, Takanori Inayoshi, Taka-aki Kawakami, Yoshinobu Matsuda, Hiroshi Fujiyama, Yuki Nitta, Tatsuyuki Nakatani

Journal:

Thin Solid Films

Year:

2010

Language:

english

File:

PDF, 394 KB

english, 2010

8

Study of plasma enhanced chemical vapor deposition of ZnO films by non-thermal plasma jet at atmospheric pressure

Yosuke Ito, Osamu Sakai, Kunihide Tachibana

Journal:

Thin Solid Films

Year:

2010

Language:

english

File:

PDF, 498 KB

english, 2010

9

Atmospheric pressure plasma liquid deposition of copper nanoparticles on poly(4-vinylpyridine)-grafted-poly(tetrafluoroethylene) surface and their autocatalytic properties

Hiroki Akiyama, Nobuyuki Zettsu, Kazuya Yamamura

Journal:

Thin Solid Films

Year:

2010

Language:

english

File:

PDF, 621 KB

english, 2010

10

(Eu3+–Nb5+)-codoped TiO2 nanopowders synthesized via Ar/O2 radio frequency thermal plasma oxidation processing: Phase composition and photoluminescence properties through energy transfer

C.-N. Zhang, J.-G. Li, Y.-H. Leng, T. Uchikoshi, T. Watanabe, T. Ishigaki

Journal:

Thin Solid Films

Year:

2010

Language:

english

File:

PDF, 297 KB

english, 2010

11

Cathodoluminescence property of ZnO nano-phosphors fabricated by pulsed Nd:YAG laser ablation in plasma circumstance

Qiang Ma, Akihisa Ogino, Takafumi Matsuda, Kosuke Shinji, Masaaki Nagatsu

Journal:

Thin Solid Films

Year:

2010

Language:

english

File:

PDF, 950 KB

english, 2010

12

X-ray photoelectron spectroscopy for analysis of plasma–polymer interactions in Ar plasmas sustained via RF inductive coupling with low-inductance antenna units

Yuichi Setsuhara, Ken Cho, Masaharu Shiratani, Makoto Sekine, Masaru Hori, Eiji Ikenaga, Shigeaki Zaima

Journal:

Thin Solid Films

Year:

2010

Language:

english

File:

PDF, 834 KB

english, 2010

13

The deposition mechanism of atmospheric pressure glow plasma polymerized hexafluoropropene: Gas phase analysis of HFP plasma

Ren Ozaki, Masuhiro Kogoma, Kunihito Tanaka

Journal:

Thin Solid Films

Year:

2010

Language:

english

File:

PDF, 719 KB

english, 2010

14

Microplasma array with metamaterial effects

Osamu Sakai, Teruki Naito, Takuya Shimomura, Kunihide Tachibana

Journal:

Thin Solid Films

Year:

2010

Language:

english

File:

PDF, 430 KB

english, 2010

15

Relationship between Ba atom emission and electrode temperature in a low-pressure fluorescent lamp

Yukihiko Yamagata, Makoto Kai, Sho Naito, Kentaro Tomita, Kiichiro Uchino, Yoshio Manabe

Journal:

Thin Solid Films

Year:

2010

Language:

english

File:

PDF, 432 KB

english, 2010

16

Bias frequency dependence of pn junction charging damage induced by plasma processing

Masayuki Kamei, Yoshinori Nakakubo, Koji Eriguchi, Kouichi Ono

Journal:

Thin Solid Films

Year:

2010

Language:

english

File:

PDF, 602 KB

english, 2010

17

Atomic-scale cellular model and profile simulation of Si etching: Formation of surface roughness and residue

Hirotaka Tsuda, Masahito Mori, Yoshinori Takao, Koji Eriguchi, Kouichi Ono

Journal:

Thin Solid Films

Year:

2010

Language:

english

File:

PDF, 604 KB

english, 2010

18

Modeling of ion-bombardment damage on Si surfaces for in-line analysis

Asahiko Matsuda, Yoshinori Nakakubo, Yoshinori Takao, Koji Eriguchi, Kouichi Ono

Journal:

Thin Solid Films

Year:

2010

Language:

english

File:

PDF, 609 KB

english, 2010

19

Low-damage surface modification of polymethylmethacrylate with argon–oxygen mixture plasmas driven by multiple low-inductance antenna units

Yuichi Setsuhara, Ken Cho, Kosuke Takenaka, Masaharu Shiratani, Makoto Sekine, Masaru Hori, Eiji Ikenaga, Shigeaki Zaima

Journal:

Thin Solid Films

Year:

2010

Language:

english

File:

PDF, 562 KB

english, 2010

20

Contact angle analysis of low-temperature cyclonic atmospheric pressure plasma modified polyethylene terephthalate

Chun Huang, Ya-Chi Chang, Shin-Yi Wu

Journal:

Thin Solid Films

Year:

2010

Language:

english

File:

PDF, 1.32 MB

english, 2010

21

SiO2 film deposition on the inner wall of a narrow polymer tube by a capacitively coupled μplasma

Hiroyuki Yoshiki, Toshiaki Mitsui, Takaya Sato, Takashi Morinaga, Shoko Marukane

Journal:

Thin Solid Films

Year:

2010

Language:

english

File:

PDF, 1018 KB

english, 2010

22

Formation of ZnO nanostructures in energy-controlled hollow-type magnetron RF plasma

Keisuke Kumeta, Hideki Ono, Satoru Iizuka

Journal:

Thin Solid Films

Year:

2010

Language:

english

File:

PDF, 371 KB

english, 2010

23

Synthesis evaluation of nitrogen atom encapsulated fullerenes by optical emission spectra in nitrogen plasmas

S. Miyanaga, T. Kaneko, H. Ishida, R. Hatakeyama

Journal:

Thin Solid Films

Year:

2010

Language:

english

File:

PDF, 365 KB

english, 2010

24

Effect of gas introduction position on substrate etching by means of Ar-dominated graphite-cathodic-arc plasma beam in μT-FAD

Hideto Tanoue, Masao Kamiya, Shinichiro Oke, Yoshiyuki Suda, Hirofumi Takikawa, Yushi Hasegawa, Makoto Taki, Nobuhiro Tsuji, Takeshi Ishikawa, Haruyuki Yasui, Shuji Temmei, Hideo Takahashi

Journal:

Thin Solid Films

Year:

2010

Language:

english

File:

PDF, 853 KB

english, 2010

25

Deposition of amorphous carbon nitride films using Ar/N2 supermagnetron sputter

Haruhisa Kinoshita, Masaya Kubota, Genji Ohno

Journal:

Thin Solid Films

Year:

2010

Language:

english

File:

PDF, 396 KB

english, 2010

26

Two-temperature non-chemical equilibrium analysis of Ar–CH4–O2 ICTP at reduced pressure

Sharif Abdullah Al-Mamun, Y. Tanaka, Y. Uesugi

Journal:

Thin Solid Films

Year:

2010

Language:

english

File:

PDF, 1.34 MB

english, 2010

27

Non-equilibrium plasma property of ArGTA in low current range

Shinichi Tashiro, Manabu Tanaka

Journal:

Thin Solid Films

Year:

2010

Language:

english

File:

PDF, 416 KB

english, 2010

28

Synthesis of single-walled carbon nanotubes by arc-vaporization under high gravity condition

GuoDong Tan, Tetsu Mieno

Journal:

Thin Solid Films

Year:

2010

Language:

english

File:

PDF, 898 KB

english, 2010

29

Production of ultrafine atmospheric pressure plasma jet with nano-capillary

Ryota Kakei, Akihisa Ogino, Futoshi Iwata, Masaaki Nagatsu

Journal:

Thin Solid Films

Year:

2010

Language:

english

File:

PDF, 399 KB

english, 2010

30

Effects of VUV/UV radiation and oxygen radicals on low-temperature sterilization in surface-wave excited O2 plasma

Ying Zhao, Mrityunjai K. Singh, Akihisa Ogino, Masaaki Nagatsu

Journal:

Thin Solid Films

Year:

2010

Language:

english

File:

PDF, 1.07 MB

english, 2010

31

Fabrication of discrete array of metallodielectric nanoshells and their surface plasmonic properties

Shuhei Uchida, Kazuya Yamamura, Nobuyuki Zettsu

Journal:

Thin Solid Films

Year:

2010

Language:

english

File:

PDF, 676 KB

english, 2010

32

Deposition of hydrophobic nano-coatings with low-pressure radio frequency CH2F2/Ar plasma processing

Chun Huang, Chien-Hsuan Pan, Chi-Hung Liu

Journal:

Thin Solid Films

Year:

2010

Language:

english

File:

PDF, 1.91 MB

english, 2010

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