Study of plasma enhanced chemical vapor deposition of ZnO films by non-thermal plasma jet at atmospheric pressure
Yosuke Ito, Osamu Sakai, Kunihide TachibanaVolume:
518
Year:
2010
Language:
english
Pages:
4
DOI:
10.1016/j.tsf.2009.11.034
File:
PDF, 498 KB
english, 2010