Formation of ZnO nanostructures in energy-controlled hollow-type magnetron RF plasma
Keisuke Kumeta, Hideki Ono, Satoru IizukaVolume:
518
Year:
2010
Language:
english
Pages:
4
DOI:
10.1016/j.tsf.2009.11.048
File:
PDF, 371 KB
english, 2010