Symposium I: Silicon and germanium issues for future CMOS...

Thin Solid Films 2010 Vol. 518; Iss. 9

Symposium I: Silicon and germanium issues for future CMOS devices

Lourdes Pelaz, Salvo Mirabella, Arne Nylandsted Larsen
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Volume:
518
Year:
2010
Language:
english
Pages:
2
DOI:
10.1016/j.tsf.2009.12.103
File:
PDF, 83 KB
english, 2010
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