Effects of Patterns on Corrosion in Cu CMP

Solid State Phenomena 2005 Vol. 103-104

Effects of Patterns on Corrosion in Cu CMP

Han, Ja Hyung, Koo, Ja Eung, Hong, Duk Ho, Park, Byung Lyul, Kim, Seong Il, Cho, In-Soo, Eom, Dae Hong, Park, Jin Goo, Busnaina, Ahmed A.
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Volume:
103-104
Year:
2005
Language:
english
Journal:
Solid State Phenomena
DOI:
10.4028/www.scientific.net/SSP.103-104.369
File:
PDF, 371 KB
english, 2005
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