Influence of Dry Ashing and Wet Treatments on NVM Metal...

Solid State Phenomena 2009 Vol. 145-146

Influence of Dry Ashing and Wet Treatments on NVM Metal Gate Structures

Elbaz, Alice C., Bellandi, Enrico, De Marco, Cinzia, Avaro, Luigi M., Ravizza, Enrica, Piva, Roberta, Alessandri, Mauro
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Volume:
145-146
Year:
2009
Language:
english
Journal:
Solid State Phenomena
DOI:
10.4028/www.scientific.net/SSP.145-146.257
File:
PDF, 547 KB
english, 2009
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