A Theoretical and Experimental Study of Damage-Free BEOL...

Solid State Phenomena 2003 Vol. 92

A Theoretical and Experimental Study of Damage-Free BEOL Cleaning with Megasonic Agitation

Lauerhaas, Jeffrey M., Wu, Yi, Bran, Mario, Fraser, Brian, Brause, Eric, Nicolosi, Tom
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Volume:
92
Year:
2003
Journal:
Solid State Phenomena
DOI:
10.4028/www.scientific.net/SSP.92.151
File:
PDF, 471 KB
2003
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