Metal Gettering by Defective Regions in Carbon-Implanted...

Solid State Phenomena 1997 Vol. 57-58

Metal Gettering by Defective Regions in Carbon-Implanted Silicon

Kögler, R., Kaschny, J.R., Yankov, R.A., Werner, P., Danilin, A.B., Skorupa, Wolfgang
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Volume:
57-58
Year:
1997
Journal:
Solid State Phenomena
DOI:
10.4028/www.scientific.net/SSP.57-58.63
File:
PDF, 422 KB
1997
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