Models of Oxygen Loss and Thermal Donor Formation in...

Models of Oxygen Loss and Thermal Donor Formation in Silicon by the Clustering of Rapidly Diffusing Oxygen Dimers

McQuaid, S.A., Newman, R.C., Muñoz Merino, Elias
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Volume:
196-201
Year:
1995
Journal:
Materials Science Forum
DOI:
10.4028/www.scientific.net/MSF.196-201.1309
File:
PDF, 463 KB
1995
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