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A Novel Copper Interconnection Cleaning by Atomic Hydrogen Using Diluted Hydrogen Gas
Abe, Kazuki, Izumi, AkiraVolume:
145-146
Year:
2009
Language:
english
Journal:
Solid State Phenomena
DOI:
10.4028/www.scientific.net/SSP.145-146.389
File:
PDF, 2.03 MB
english, 2009