Advanced Cylindrical Capacitor Formation Using Gas-Phase Selective Etching
Hanestad, Ron, Schwab, Brent, Butterbaugh, Jeffery W., Lee, Kun Tack, Shim, Woo Gwan, Kim, Sang Yong, Han, Yong PilVolume:
92
Year:
2003
Journal:
Solid State Phenomena
DOI:
10.4028/www.scientific.net/SSP.92.203
File:
PDF, 321 KB
2003