Mechanism of Deep Penetration of Plasma-Induced Defects...

Mechanism of Deep Penetration of Plasma-Induced Defects inGaAs: Minority Carrier Injection Effect

Nakanishi, Hachiro, Wada, Keiji
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Volume:
196-201
Year:
1995
Journal:
Materials Science Forum
DOI:
10.4028/www.scientific.net/MSF.196-201.1407
File:
PDF, 440 KB
1995
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