Passivation of the Oxide/4H-SiC Interface

Materials Science Forum 2002 Vol. 389-393

Passivation of the Oxide/4H-SiC Interface

Jamet, Philippe, Dimitrijev, Sima, Tanner, P.
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Volume:
389-393
Year:
2002
Journal:
Materials Science Forum
DOI:
10.4028/www.scientific.net/MSF.389-393.973
File:
PDF, 331 KB
2002
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