TEM (XHREM) and EDX Studies of 6H-SiC Porous Layer as a...

Materials Science Forum 2002 Vol. 389-393

TEM (XHREM) and EDX Studies of 6H-SiC Porous Layer as a Substrate for Subsequent Homoepitaxial Growth

Sorokin, L.M., Hutchison, John L., Sloan, Jeremy, Mosina, G.N., Savkina, N.S., Shuman, V.B., Lebedev, A.A.
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Volume:
389-393
Year:
2002
Journal:
Materials Science Forum
DOI:
10.4028/www.scientific.net/MSF.389-393.271
File:
PDF, 479 KB
2002
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