Optimization of n+ nc-Si:H and a-SiNx:H layers for their application in nc-Si:H TFT
Tamila (Aliyeva) Anutgan, Mustafa Anutgan, Ismail Atilgan, Bayram KatirciogluVolume:
85
Year:
2011
Language:
english
Pages:
6
DOI:
10.1016/j.vacuum.2010.12.014
File:
PDF, 510 KB
english, 2011