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Preparation of B–C–N films by magnetron sputtering with different N2/Ar flow ratio
Fuchao Jia, Chunqiang Zhuang, Changyu Guan, Jijun Zhao, Yizhen Bai, Xin JiangVolume:
85
Year:
2011
Language:
english
Pages:
5
DOI:
10.1016/j.vacuum.2011.01.004
File:
PDF, 296 KB
english, 2011