Low Temperature Pre-Epi Treatment: Critical Parameters to...

Solid State Phenomena 2009 Vol. 145-146

Low Temperature Pre-Epi Treatment: Critical Parameters to Control Interface Contamination

Loo, Roger, Hikavyy, Andriy, Leys, Frederik E., Wada, Masayuki, Sano, Kenichi, De Vos, Brecht, Pacco, Antoine, Bargallo Gonzalez, Mireia, Simoen, Eddy, Verheyen, Peter, Vanherle, Wendy, Caymax, Matty
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Volume:
145-146
Year:
2009
Language:
english
Journal:
Solid State Phenomena
DOI:
10.4028/www.scientific.net/SSP.145-146.177
File:
PDF, 320 KB
english, 2009
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