Precipitation of Cu, Ni and Fe on Frank-Type Partial...

Precipitation of Cu, Ni and Fe on Frank-Type Partial Dislocations in Czochralski-Grown Silicon

Shen, Bo, Sekiguchi, Takashi, Sumino, Koji
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Volume:
196-201
Year:
1995
Journal:
Materials Science Forum
DOI:
10.4028/www.scientific.net/MSF.196-201.1207
File:
PDF, 540 KB
1995
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