Silicon Carbide Vertical JFET with Self-Aligned Nickel...

Materials Science Forum 2011 / 3 Vol. 679-680

Silicon Carbide Vertical JFET with Self-Aligned Nickel Silicide Contacts

Vassilevski, Konstantin, Nikitina, Irina P., Horsfall, Alton B., Wright, Nicolas G., Smith, Andrew J., Johnson, C. Mark
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Volume:
679-680
Language:
english
Journal:
Materials Science Forum
DOI:
10.4028/www.scientific.net/MSF.679-680.670
Date:
March, 2011
File:
PDF, 760 KB
english, 2011
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