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Impact of Metal-Ion Contaminated Silica Particles on Gate Oxide Integrity
Rink, Ingrid, Wali, Faisal, Knotter, D. MartinVolume:
145-146
Year:
2009
Language:
english
Journal:
Solid State Phenomena
DOI:
10.4028/www.scientific.net/SSP.145-146.131
File:
PDF, 999 KB
english, 2009