Annealing Behaviour of New Nitrogen Infrared Absorption...

Annealing Behaviour of New Nitrogen Infrared Absorption Peaks in CZ Silicon

Inoue, N., Nakatsu, M., Tanahashi, K., Yamada-Kaneta, Hiroshi, Ono, Haruhiko, Akhmetov, V.D., Lysytskiy, O., Richter, Hans
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Volume:
108-109
Year:
2005
Journal:
Solid State Phenomena
DOI:
10.4028/www.scientific.net/SSP.108-109.609
File:
PDF, 1.30 MB
2005
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