![](/img/cover-not-exists.png)
Influence of Metal Contamination in the Measurement of p-Type Cz Silicon Wafer Lifetime and Impact on the Oxide Growth
Bigot, Carole, Danel, Adrien, Thevenin, S.Volume:
108-109
Year:
2005
Journal:
Solid State Phenomena
DOI:
10.4028/www.scientific.net/SSP.108-109.297
File:
PDF, 1.93 MB
2005