InGaAs (110) Surface Cleaning Using Atomic Hydrogen

Solid State Phenomena 2014 / 9 Vol. 219

InGaAs (110) Surface Cleaning Using Atomic Hydrogen

Kent, Tyler, Edmonds, Mary, Droopad, Ravi, Kummel, Andrew C.
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Volume:
219
Language:
english
Journal:
Solid State Phenomena
DOI:
10.4028/www.scientific.net/ssp.219.47
Date:
September, 2014
File:
PDF, 1.09 MB
english, 2014
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