Cu coating inside small (15 µm) and ultrahigh-aspect-ratio...

Japanese Journal of Applied Physics 2014 / 05 Vol. 53; Iss. 5S2

Cu coating inside small (15 µm) and ultrahigh-aspect-ratio (>130) through-holes using supercritical CO 2 fluid

Watanabe, Mitsuhiro, Takeuchi, Yuto, Ueno, Takahiro, Kondoh, Eiichi, Yamamoto, Satoshi, Kikukawa, Naohiro, Suemasu, Tatsuo
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Volume:
53
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.7567/JJAP.53.05GA08
Date:
May, 2014
File:
PDF, 425 KB
english, 2014
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