Microfabrication of low thermal mass heated nebulizer chips for mass spectrometry
Wirtssohn, Matti, Sainiemi, Lauri, Haapala, Markus, Franssila, SamiVolume:
23
Language:
english
Journal:
Journal of Micromechanics and Microengineering
DOI:
10.1088/0960-1317/23/7/074006
Date:
July, 2013
File:
PDF, 198 KB
english, 2013