Volume 23; Issue 7

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Journal of Micromechanics and Microengineering
Volume 23; Issue 7

Journal of Micromechanics and Microengineering

Volume 23; Issue 7

1

Piezoelectric rubber films for highly sensitive impact measurement

Wang, Jhih-Jhe, Tsai, Jui-Wei, Su, Yu-Chuan

Journal:

Journal of Micromechanics and Microengineering

Year:

2013

Language:

english

File:

PDF, 1.47 MB

english, 2013

2

Tunable diffractive filters for robust NIR and IR spectroscopy

Lacolle, M, Johansen, I R, Bakke, T, Sagberg, H

Journal:

Journal of Micromechanics and Microengineering

Year:

2013

Language:

english

File:

PDF, 1.22 MB

english, 2013

3

Level set implementation for the simulation of anisotropic etching: application to complex MEMS micromachining

Montoliu, C, Ferrando, N, Gosálvez, M A, Cerdá, J, Colom, R J

Journal:

Journal of Micromechanics and Microengineering

Year:

2013

Language:

english

File:

PDF, 1.98 MB

english, 2013

4

Fabrication of 2D polymer nanochannels by sidewall lithography and hot embossing

Cheng, E, Zou, Helin, Yin, Zhifu, Jurčíček, Petr, Zhang, Xi

Journal:

Journal of Micromechanics and Microengineering

Year:

2013

Language:

english

File:

PDF, 1.72 MB

english, 2013

5

Nonlinear dynamics of an electrically actuated imperfect microbeam resonator: experimental investigation and reduced-order modeling

Ruzziconi, Laura, Bataineh, Ahmad M, Younis, Mohammad I, Cui, Weili, Lenci, Stefano

Journal:

Journal of Micromechanics and Microengineering

Year:

2013

Language:

english

File:

PDF, 2.09 MB

english, 2013

6

Experimental investigation of passive micromixers conceptual design using the layout optimization method

Liu, Yongshun, Deng, Yongbo, Zhang, Ping, Liu, Zhenyu, Wu, Yihui

Journal:

Journal of Micromechanics and Microengineering

Year:

2013

Language:

english

File:

PDF, 2.42 MB

english, 2013

7

A micromirror with CNTs hinge fabricated by the integration of CNTs film into a MEMS actuator

Dau, Van Thanh, Tung, Bui Thanh, Dinh, Thien Xuan, Dao, Dzung Viet, Yamada, Takeo, Hata, Kenji, Sugiyama, Susumu

Journal:

Journal of Micromechanics and Microengineering

Year:

2013

Language:

english

File:

PDF, 1.24 MB

english, 2013

8

A temperature control method for shortening thermal cycling time to achieve rapid polymerase chain reaction (PCR) in a disposable polymer microfluidic device

Bu, Minqiang, Perch-Nielsen, Ivan R, Sørensen, Karen S, Skov, Julia, Sun, Yi, Duong Bang, Dang, Pedersen, Michael E, Hansen, Mikkel F, Wolff, Anders

Journal:

Journal of Micromechanics and Microengineering

Year:

2013

Language:

english

File:

PDF, 1.06 MB

english, 2013

9

Design and characterization of AlN-based in-plane microplate resonators

Ruiz-Díez, V, Manzaneque, T, Hernando-García, J, Ababneh, A, Kucera, M, Schmid, U, Seidel, H, Sánchez-Rojas, J L

Journal:

Journal of Micromechanics and Microengineering

Year:

2013

Language:

english

File:

PDF, 1.44 MB

english, 2013

10

Fabrication of continuous diffractive optical elements using a fast tool servo diamond turning process

Zhou, Jingbo, Li, Lei, Naples, Neil, Sun, Tao, Yi, Allen Y

Journal:

Journal of Micromechanics and Microengineering

Year:

2013

Language:

english

File:

PDF, 1.58 MB

english, 2013

11

Permanent magnet microstructures using dry-pressed magnetic powders

Oniku, Ololade D, Bowers, Benjamin J, Shetye, Sheetal B, Wang, Naigang, Arnold, David P

Journal:

Journal of Micromechanics and Microengineering

Year:

2013

Language:

english

File:

PDF, 686 KB

english, 2013

12

Size sorting of floating spheres based on Marangoni forces in evaporating droplets

Hendarto, Erwin, Gianchandani, Yogesh B

Journal:

Journal of Micromechanics and Microengineering

Year:

2013

Language:

english

File:

PDF, 1.63 MB

english, 2013

13

Development of a through wafer 3D vertical micro-coaxial probe

Boone, Justin, Krishnan, Subramanian, Bhansali, Shekhar

Journal:

Journal of Micromechanics and Microengineering

Year:

2013

Language:

english

File:

PDF, 1.72 MB

english, 2013

14

Low-temperature thin-film indium bonding for reliable wafer-level hermetic MEMS packaging

Straessle, R, Pétremand, Y, Briand, D, Dadras, M, de Rooij, N F

Journal:

Journal of Micromechanics and Microengineering

Year:

2013

Language:

english

File:

PDF, 1.32 MB

english, 2013

15

Process characterization for direct dispense fabrication of polymer optical multi-mode waveguides

Dingeldein, Joseph C, Walczak, Karl A, Swatowski, Brandon W, Friedrich, Craig R, Middlebrook, Christopher T, Roggemann, Michael C

Journal:

Journal of Micromechanics and Microengineering

Year:

2013

Language:

english

File:

PDF, 1.13 MB

english, 2013

16

Fabrication process for tall, sharp, hollow, high aspect ratio polymer microneedles on a platform

Ceyssens, Frederik, Chaudhri, Buddhadev Paul, Van Hoof, Chris, Puers, Robert

Journal:

Journal of Micromechanics and Microengineering

Year:

2013

Language:

english

File:

PDF, 1.08 MB

english, 2013

17

Online monitoring of the passivation breakthrough during deep reactive ion etching of silicon using optical plasma emission spectroscopy

Leopold, S, Mueller, L, Kremin, C, Hoffmann, M

Journal:

Journal of Micromechanics and Microengineering

Year:

2013

Language:

english

File:

PDF, 1.15 MB

english, 2013

18

Ordered arrays of patterned nanoporous silicon

Wang, D, Schönherr, S, Ji, R, Herz, A, Ronning, C, Schaaf, P

Journal:

Journal of Micromechanics and Microengineering

Year:

2013

Language:

english

File:

PDF, 3.04 MB

english, 2013

19

Cell manipulation tool with combined microwell array and optical tweezers for cell isolation and deposition

Wang, Xiaolin, Gou, Xue, Chen, Shuxun, Yan, Xiao, Sun, Dong

Journal:

Journal of Micromechanics and Microengineering

Year:

2013

Language:

english

File:

PDF, 2.42 MB

english, 2013

20

Electrochemically deposited and etched membranes with precisely sized micropores for biological fluids microfiltration

Hamzah, A A, Zainal Abidin, H E, Yeop Majlis, B, Mohd Nor, M, Ismardi, A, Sugandi, G, Tiong, T Y, Dee, C F, Yunas, J

Journal:

Journal of Micromechanics and Microengineering

Year:

2013

Language:

english

File:

PDF, 711 KB

english, 2013

21

Large-scale solvent-swelling-based amplification of microstructured sharkskin

Pan, Junfeng, Chen, Huawei, Zhang, Deyuan, Zhang, Xin, Yuan, Liming, Aobo, Li

Journal:

Journal of Micromechanics and Microengineering

Year:

2013

Language:

english

File:

PDF, 1.45 MB

english, 2013

22

Ultra-thin layer packaging for implantable electronic devices

Hogg, A, Aellen, T, Uhl, S, Graf, B, Keppner, H, Tardy, Y, Burger, J

Journal:

Journal of Micromechanics and Microengineering

Year:

2013

Language:

english

File:

PDF, 1.65 MB

english, 2013

23

A three-axis high-resolution capacitive tactile imager system based on floating comb electrodes

Surapaneni, R, Guo, Q, Xie, Y, Young, D J, Mastrangelo, C H

Journal:

Journal of Micromechanics and Microengineering

Year:

2013

Language:

english

File:

PDF, 2.72 MB

english, 2013

24

Fabrication of laterally driven bulk titanium devices on titanium-on-glass wafers

Zhang, Yiming, Li, Nannan, Yan, Bo, Feng, Xiaoyang, Hu, Jia, He, Shuwei, Hao, Yilong, Chen, Jing

Journal:

Journal of Micromechanics and Microengineering

Year:

2013

Language:

english

File:

PDF, 168 KB

english, 2013

25

Technology for integrated circuit micropackages for neural interfaces, based on gold–silicon wafer bonding

Saeidi, N, Schuettler, M, Demosthenous, A, Donaldson, N

Journal:

Journal of Micromechanics and Microengineering

Year:

2013

Language:

english

File:

PDF, 321 KB

english, 2013

26

Microfabrication of low thermal mass heated nebulizer chips for mass spectrometry

Wirtssohn, Matti, Sainiemi, Lauri, Haapala, Markus, Franssila, Sami

Journal:

Journal of Micromechanics and Microengineering

Year:

2013

Language:

english

File:

PDF, 198 KB

english, 2013

27

Development and evaluation of a two-level functional structure for the thin film encapsulation

Lee, Jae-Wung, Sharma, Jaibir, Singh, Navab, Kwong, Dim-Lee

Journal:

Journal of Micromechanics and Microengineering

Year:

2013

Language:

english

File:

PDF, 336 KB

english, 2013

28

In situ test structures for the thermal expansion coefficient and residual stress of polysilicon thin films

Liu, Hai-Yun, Li, Wei-Hua, Zhou, Zai-Fa, Huang, Qing-An

Journal:

Journal of Micromechanics and Microengineering

Year:

2013

Language:

english

File:

PDF, 2.08 MB

english, 2013

29

Polymer circuit boards fabricated by ultrasonic hot embossing

Li, J, Gerhardy, C, Schomburg, W K

Journal:

Journal of Micromechanics and Microengineering

Year:

2013

Language:

english

File:

PDF, 1.02 MB

english, 2013

30

Influence of aluminum nitride crystal orientation on MEMS energy harvesting device performance

Jackson, Nathan, O’Keeffe, Rosemary, Waldron, Finbarr, O’Neill, Mike, Mathewson, Alan

Journal:

Journal of Micromechanics and Microengineering

Year:

2013

Language:

english

File:

PDF, 610 KB

english, 2013

31

Large area and broadband semi-reflective Bragg mirror membrane manufactured by PECVD

Bertin, H, Bosseboeuf, A, Coste, P, Péalat, M, Roux, N

Journal:

Journal of Micromechanics and Microengineering

Year:

2013

Language:

english

File:

PDF, 813 KB

english, 2013

32

Measurements of turbulence in a microscale multi-inlet vortex nanoprecipitation reactor

Shi, Yanxiang, Cheng, Janine Chungyin, Fox, Rodney O, Olsen, Michael G

Journal:

Journal of Micromechanics and Microengineering

Year:

2013

Language:

english

File:

PDF, 390 KB

english, 2013

33

Selected papers from the 23rd MicroMechanics and Microsystems Europe Workshop (MME 2012) (Ilmenau, Germany, September 9–12, 2012)

Hoffmann, Martin

Journal:

Journal of Micromechanics and Microengineering

Year:

2013

Language:

english

File:

PDF, 2.38 MB

english, 2013

34

Realization of ultrafast and high-quality anodic bonding using a non-contact scanning electrode

Wu, Jim-Wei, Yang, Chii-Rong, Huang, Mao-Jung, Yang, Cheng-Hao, Huang, Che-Yi

Journal:

Journal of Micromechanics and Microengineering

Year:

2013

Language:

english

File:

PDF, 418 KB

english, 2013

35

Heterogeneous 3D integration of hidden hinge micromirror arrays consisting of two layers of monocrystalline silicon

Lapisa, Martin, Zimmer, Fabian, Stemme, Göran, Gehner, Andreas, Niklaus, Frank

Journal:

Journal of Micromechanics and Microengineering

Year:

2013

Language:

english

File:

PDF, 291 KB

english, 2013

36

Characterization of the tuning performance of a micro-machined Fabry–Pérot interferometer for thermal infrared

Tuohiniemi, M, Näsilä, A, Mäkynen, J

Journal:

Journal of Micromechanics and Microengineering

Year:

2013

Language:

english

File:

PDF, 856 KB

english, 2013

37

Silicon–glass-based single piezoresistive pressure sensors for harsh environment applications

San, Haisheng, Zhang, Hong, Zhang, Qiang, Yu, Yuxi, Chen, Xuyuan

Journal:

Journal of Micromechanics and Microengineering

Year:

2013

Language:

english

File:

PDF, 1.08 MB

english, 2013

38

Molybdenum etching using an SF 6 , BCl 3 and Ar based recipe for high aspect ratio MEMS device fabrication

Sharma, J, Fernando, S N, Deng, W, Singh, N, Tan, W M

Journal:

Journal of Micromechanics and Microengineering

Year:

2013

Language:

english

File:

PDF, 1.48 MB

english, 2013

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