Infrared Absorption Measurement of Carbon Concentration...

Solid State Phenomena 2005 Vol. 108-109

Infrared Absorption Measurement of Carbon Concentration down to 1x1014/cm3 in CZ Silicon

Inoue, N., Nakatsu, M.
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Volume:
108-109
Year:
2005
Language:
english
Journal:
Solid State Phenomena
DOI:
10.4028/www.scientific.net/SSP.108-109.621
File:
PDF, 332 KB
english, 2005
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