Effect of nitrogen on denuded zone in Czochralski silicon...

Semiconductor Science and Technology 2004 / 03 Vol. 19; Iss. 3

Effect of nitrogen on denuded zone in Czochralski silicon wafer

Cui, Can, Yang, Deren, Yu, Xuegong, Ma, Xiangyang, Li, Liben, Que, Duanlin
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Volume:
19
Language:
english
Journal:
Semiconductor Science and Technology
DOI:
10.1088/0268-1242/19/3/047
Date:
March, 2004
File:
PDF, 603 KB
english, 2004
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