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Advanced metallization concepts and impact on reliability
Hauschildt, Meike, Hintze, Bernd, Gall, Martin, Koschinsky, Frank, Preusse, Axel, Bolom, Tibor, Nopper, Markus, Beyer, Armand, Aubel, Oliver, Talut, Georg, Zschech, EhrenfriedVolume:
53
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.7567/JJAP.53.05GA11
Date:
May, 2014
File:
PDF, 222 KB
english, 2014