Effects of Chamber Pressure on the Performance of CO2 Beam...

Effects of Chamber Pressure on the Performance of CO2 Beam Cleaning

Kim, Seung Ho, Lee, Joong Ha, Kim, Ho Young
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Volume:
219
Language:
english
Journal:
Solid State Phenomena
DOI:
10.4028/www.scientific.net/SSP.219.131
Date:
September, 2014
File:
PDF, 734 KB
english, 2014
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