Characterization of Post Etch Residues Depending on Resist...

Solid State Phenomena 2009 Vol. 145-146

Characterization of Post Etch Residues Depending on Resist Removal Processes after Aluminum Etch

Heidenblut, Maria, Sturm, D., Lechner, Alfred, Faupel, Franz
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Volume:
145-146
Year:
2009
Language:
english
Journal:
Solid State Phenomena
DOI:
10.4028/www.scientific.net/SSP.145-146.349
File:
PDF, 548 KB
english, 2009
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