Low-Temperature Doping of P-Type Czochralski Silicon due to...

Solid State Phenomena 1997 Vol. 57-58

Low-Temperature Doping of P-Type Czochralski Silicon due to Hydrogen Plasma Enhanced Thermal Donor Formation

Ulyashin, Alexander G., Bumay, Yu.A., Job, Reinhart, Grabosch, G., Borchert, D., Fahrner, Wolfgang R., Diduk, A.Yu.
How much do you like this book?
What’s the quality of the file?
Download the book for quality assessment
What’s the quality of the downloaded files?
Volume:
57-58
Year:
1997
Journal:
Solid State Phenomena
DOI:
10.4028/www.scientific.net/SSP.57-58.189
File:
PDF, 425 KB
1997
Conversion to is in progress
Conversion to is failed